Gas-phase study of the reactivity of optical coating materials with hydrocarbons by use of a desktop-size extreme-ultraviolet laser
نویسندگان
چکیده
Scott Heinbuch,* Feng Dong, Jorge J. Rocca, and Elliot R. Bernstein Department of Electrical and Computer Engineering, Colorado State University, 1320 Campus Delivery, Fort Collins, Colorado 80523-1320, USA National Science Foundation, Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado State University, 1320 Campus Delivery, Fort Collins, Colorado 80523-1320, USA Department of Chemistry, Colorado State University, 1872 Campus Delivery, Fort Collins, Colorado 80523-1872, USA *Corresponding author: [email protected]
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